Such actuators can convert electrical energy into mechanical energy under an electric field and produce precision mechanical displacement. The piezoelectric disk could be valuable in applications involving micro-nano devices.Ī piezoelectric actuator is a device that uses the inverse piezoelectric effect of piezoelectric materials. The actuator demonstrated better displacement properties. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The results showed that the effect of electrode width on displacement was small. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. Then Ø25 mm × 2 mm samples were prepared. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators.
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